High aspect ratio surface relief structures by photoembossing

Manufacturing of Surface Relief Structures in Moving Substrates Using Photoembossing and Pulsed- Interference Holography

Photoembossing is a cost-effective technique for the production of complex surface relief structures in a photopolymer film, achieved via contact-mask exposure to UVlight. Here, photoembossing is explored using interference holography with a CWlaser and a nanosecond pulsed laser. It is shown that identical surface relief structures are produced if the photopolymer film is kept in a fixed positi...

Improving surface acousto-optical interaction by high aspect ratio electrodes

High aspect ratio titanium nitride trench structures as plasmonic biosensor

High aspect ratio titanium nitride (TiN) grating structures are fabricated by the combination of deep reactive ion etching (DRIE) and atomic layer deposition (ALD) techniques. TiN is deposited at 500 ◦C on a silicon trench template. Silicon between vertical TiN layers is selectively etched to fabricate the high aspect ratio TiN trenches with the pitch of 400 nm and height of around 2.7 μm. Diel...

Stability of microfabricated high aspect ratio structures in poly(dimethylsiloxane).

The stability of structures microfabricated in soft elastomeric polymers is an important concern in most applications that use these structures. Although relevant for several applications, the collapse to the ground of high aspect ratio structures (ground collapse) is still poorly understood. The stability of soft microfabricated high aspect ratio structures versus ground collapse was experimen...

Hydrothermal Synthesis of ZnO Structures Formed by High-Aspect-Ratio Nanowires for Acetone Detection

Snowflake-like ZnO structures originating from self-assembled nanowires were prepared by a low-temperature aqueous solution method. The as-grown hierarchical ZnO structures were investigated by X-ray diffraction (XRD) and field-emission scanning electron microscopy (FESEM). The results showed that the snowflake-like ZnO structures were composed of high-aspect-ratio nanowires. Furthermore, gas-s...